Evaluation of comb-drive nickel micromirror for fiber optical communication

Author

Akimoto, Koji ; Uenishi, Yuji ; Honma, Kazuharu ; Nagaoka, Shinji

Author_Institution

NTT Opto-Electron. Labs., Tokyo, Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

66

Lastpage

71

Abstract

A novel nickel micromirror with an electrostatic comb-drive actuator has been developed. We evaluate both the optical and mechanical characteristics of the device. It is fabricated by nickel surface micromachining, which features a thick photoresist mold process and nickel electroplating. For the optical evaluation, the reflectance of the micromirror is estimated using a hemi-spherical-end fiber. For the mechanical evaluation, the frequency response and displacement against the driving voltage are measured by a fiber reflective filter, which is an etalon constructed between the flat-end fiber and the micromirror facet

Keywords

displacement measurement; frequency measurement; integrated optics; light reflection; micromachining; micromechanical devices; mirrors; nickel; optical communication equipment; optical fibres; optical filters; photoresists; Ni; comb-drive nickel micromirror; driving voltage; electrostatic comb-drive actuator; fiber optical communication; fiber reflective filter; flat-end fiber; frequency response; hemi-spherical-end fiber; mechanical characteristics; mechanical evaluation; micromirror; nickel electroplating; nickel surface micromachining; optical and mechanical characteristics; reflectance; thick photoresist mold process; Electrostatic actuators; Micromachining; Micromirrors; Nickel; Optical devices; Optical fiber devices; Optical fibers; Optical filters; Reflectivity; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581768

Filename

581768