Title :
Evaluation of comb-drive nickel micromirror for fiber optical communication
Author :
Akimoto, Koji ; Uenishi, Yuji ; Honma, Kazuharu ; Nagaoka, Shinji
Author_Institution :
NTT Opto-Electron. Labs., Tokyo, Japan
Abstract :
A novel nickel micromirror with an electrostatic comb-drive actuator has been developed. We evaluate both the optical and mechanical characteristics of the device. It is fabricated by nickel surface micromachining, which features a thick photoresist mold process and nickel electroplating. For the optical evaluation, the reflectance of the micromirror is estimated using a hemi-spherical-end fiber. For the mechanical evaluation, the frequency response and displacement against the driving voltage are measured by a fiber reflective filter, which is an etalon constructed between the flat-end fiber and the micromirror facet
Keywords :
displacement measurement; frequency measurement; integrated optics; light reflection; micromachining; micromechanical devices; mirrors; nickel; optical communication equipment; optical fibres; optical filters; photoresists; Ni; comb-drive nickel micromirror; driving voltage; electrostatic comb-drive actuator; fiber optical communication; fiber reflective filter; flat-end fiber; frequency response; hemi-spherical-end fiber; mechanical characteristics; mechanical evaluation; micromirror; nickel electroplating; nickel surface micromachining; optical and mechanical characteristics; reflectance; thick photoresist mold process; Electrostatic actuators; Micromachining; Micromirrors; Nickel; Optical devices; Optical fiber devices; Optical fibers; Optical filters; Reflectivity; Resists;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581768
