Title :
The first valve-less diffuser gas pump
Author :
Olsson, Anders ; Stemme, Göran ; Stemme, Erik
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
The first valve-less gas pump based on the fluid directing properties of diffusers has been fabricated and tested. The pump, fabricated in brass, consists of two flat-wall diffusers connected to a pump chamber with two diaphragms excited by piezo discs. The pump dimensions are 20×16×2.3 mm. The measured maximum pump pressure and volume flow are 5 kPa (0.5 mH2O) and 8 ml/min, respectively. An electrical analogy is used to calculate the pump resonance frequencies and the pump flow
Keywords :
brass; diaphragms; microactuators; micropumps; piezoelectric actuators; 16 mm; 2.3 mm; 20 mm; 5 kPa; CuZn; brass; diaphragms; diffusers; electrical analogy; flat-wall diffusers; maximum pump pressure; piezo discs; pump chamber; pump dimensions; pump flow; pump resonance frequencies; valve-less diffuser gas pump; volume flow; Biomedical measurements; Capacitance; Circuits; Fluid flow measurement; Gas detectors; Pumps; Resonance; Resonant frequency; Sensor systems; System testing;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581780
