DocumentCode
3426769
Title
The first valve-less diffuser gas pump
Author
Olsson, Anders ; Stemme, Göran ; Stemme, Erik
Author_Institution
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
fYear
1997
fDate
26-30 Jan 1997
Firstpage
108
Lastpage
113
Abstract
The first valve-less gas pump based on the fluid directing properties of diffusers has been fabricated and tested. The pump, fabricated in brass, consists of two flat-wall diffusers connected to a pump chamber with two diaphragms excited by piezo discs. The pump dimensions are 20×16×2.3 mm. The measured maximum pump pressure and volume flow are 5 kPa (0.5 mH2O) and 8 ml/min, respectively. An electrical analogy is used to calculate the pump resonance frequencies and the pump flow
Keywords
brass; diaphragms; microactuators; micropumps; piezoelectric actuators; 16 mm; 2.3 mm; 20 mm; 5 kPa; CuZn; brass; diaphragms; diffusers; electrical analogy; flat-wall diffusers; maximum pump pressure; piezo discs; pump chamber; pump dimensions; pump flow; pump resonance frequencies; valve-less diffuser gas pump; volume flow; Biomedical measurements; Capacitance; Circuits; Fluid flow measurement; Gas detectors; Pumps; Resonance; Resonant frequency; Sensor systems; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location
Nagoya
ISSN
1084-6999
Print_ISBN
0-7803-3744-1
Type
conf
DOI
10.1109/MEMSYS.1997.581780
Filename
581780
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