A MEMS thermopneumatic silicone membrane valve

Author

Yang, Xing ; Grosjean, Charles ; Tai, Yu-Chong ; Ho, Chih-Ming

Author_Institution

Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA

fYear

1997

fDate

26-30 Jan 1997

Firstpage

114

Lastpage

118

Abstract

A technology for fabricating silicone rubber membranes and integrating them with other processes on a silicon wafer has been developed. Silicone rubber has been found to have exceptional mechanical properties including low modulus, high elongation, and good sealing. An integrated normally open valve using a silicone rubber membrane and 3M PF5060 liquid for thermopneumatic actuation has been fabricated and tested. For a 1.3 lpm air flow, 280 mW is required to close the valve at 20 PSI inlet pressure. Due to the high permeability of silicone rubber, most liquids used in thermopneumatic systems will be lost, necessitating more work to find a suitable barrier material compatible with silicone rubber

Keywords

membranes; microactuators; semiconductor technology; silicone rubber; valves; 20 psi; 280 mW; 3M PF5060 liquid; MEMS thermopneumatic silicone membrane valve; Si rubber membrane; barrier material; inlet pressure; integrated normally open valve; permeability; thermopneumatic actuation; Actuators; Biomembranes; Etching; Micromechanical devices; Plasma applications; Plasma temperature; Rubber; Silicon; USA Councils; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581782

Filename

581782