Title :
3C-SiC coating of silicon micromachined atomizers
Author :
Rajan, Niju ; Zorman, C. ; Mehregany, M. ; DeAnna, R. ; Harvey, R.
Author_Institution :
Microfabrication Lab., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
This paper presents a study of 3C-silicon carbide (3C-SiC) coating on the flow surfaces of silicon micromachined atomizers. There are two important aspects to this study. Firstly, it demonstrates that SiC coating significantly enhances several elements of the performance of Si micromachined atomisers. Secondly, it shows that conformal deposition of 3C-SiC on high aspect ratio mechanical structures is attainable with the APCVD process described below
Keywords :
chemical vapour deposition; conformal coatings; elemental semiconductors; gas turbines; masks; micromechanical devices; silicon; silicon compounds; sprays; wear resistant coatings; 3C-SiC coating; APCVD; Si; Si micromachined atomisers; SiC coating; SiC deposition; SiC polytypes; SiC-Si; conformal deposition; flow surfaces; gas turbine engines; protective coating; Atomic layer deposition; Coatings; Etching; Fuels; Orifices; Shape; Silicon carbide; Spraying; Surface morphology; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581793
