• DocumentCode
    3427305
  • Title

    Assembling process for microscopic components using magnetic force

  • Author

    Ota, Hitoshi ; Araki, Takeshi ; Takeda, Munehisa ; Narumiya, Hiromu ; Ohara, Takao

  • Author_Institution
    Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
  • fYear
    1997
  • fDate
    26-30 Jan 1997
  • Firstpage
    209
  • Lastpage
    214
  • Abstract
    Current methods of assembling micromachines, for example handling components using a manipulator, require accurate component positioning. In addition, it is difficult to establish electrical connections between the components with these methods. To solve these problems, this paper investigates a process for assembling microscopic components using magnetic polarity and attraction. The aim is to conduct basic research into the processes of assembling multiple components in a short time. First, the components are positioned tentatively by generating torque in the components due to magnetic polarity. After being positioned accurately by means of the tapers, the components can be connected mechanically and electrically. To study the validity of this concept, an assembly test was conducted. Bonding elements and assembly test equipment were fabricated for this test in order to examine the positioning accuracy achieved when the components were joined
  • Keywords
    magnetic devices; microassembling; micromechanical devices; permanent magnets; position control; small electric machines; assembling; attraction; bonding; component positioning; electrical connections; handling; magnetic force; magnetic polarity; manipulator; micromachines; microscopic components; positioning accuracy; Actuators; Assembly systems; Bonding; Magnetic force microscopy; Magnetic forces; Magnetic separation; Permanent magnets; Substrates; Testing; Torque;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
  • Conference_Location
    Nagoya
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-3744-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1997.581805
  • Filename
    581805