A proportional microvalve using a bi-stable magnetic actuator

Author

Shinozawa, Yasuhiko ; Abe, Takeshi ; Kondo, Takehiko

Author_Institution

Frontier Technol. Res. Inst., Tokyo Gas Co. Ltd., Japan

fYear

1997

fDate

26-30 Jan 1997

Firstpage

233

Lastpage

237

Abstract

A simple electromagnetic miniature valve was fabricated using a combination of a micromachined coil and a permanent magnet. The dimension of the valve including the actuator is about 5×5×5 mm, and the valve has a 0.5 mm valve cap displacement which significantly alleviates the clogging problem by using a bi-stable actuation of the magnet. The smallest controllable amount of water was 0.7 μ1/min, and flow rates through the valve less than 900 μ1/min can be continuously adjusted by a duty ratio control of driving current to the micro coil

Keywords

coils; flow control; fluidic devices; magnetic devices; microactuators; permanent magnets; proportional control; valves; 5 mm; Si; bi-stable magnetic actuator; clogging; electromagnetic miniature valve; flow rates; micro coil; micromachined coil; permanent magnet; proportional microvalve; Coils; Electromagnetic forces; Electrostatic actuators; Fluid flow control; Fluidic microsystems; Microfluidics; Microvalves; Permanent magnets; Surface tension; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581809

Filename

581809