Micromanipulator utilizing a bending and expanding motion actuator

This paper presents a new driving method of an impact driven micromanipulator (IDM). The IDM utilizes the bending and expanding motion actuator (BEMA). The IDM provides both fine and coarse motion. Bending and expanding motion of the BEMA realizes the fine motion, and impact drive of the BEMA realizes the coarse motion. Thus, it has a wide dynamic range (reachable rotational angle is ±90 degrees) and a high resolution (less than 10 nm) with a single mechanism. Instead of sawtooth wave which is used for the impact drive conventionally, the impact drive by pulse wave is proved to be effective for driving the IDM. By controlling the impact timing, the pulse wave drive can realize the rotational angle of the joint during one cycle of 1.5 times in comparison with the sawtooth wave drive. Furthermore, the pulse wave drive enables the optimum impact timing independent on the driving frequency and the simplification of driving circuit. Therefore the pulse wave drive is suitable for the IDM