Title :
Trajectory morphing applied to epitaxial thin film growth
Author :
Engelmann, A.P. ; Meyer, David G. ; Hauser, John ; Caflisch, Russell
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO, USA
Abstract :
Several recent developments have made it possible to begin exploring in formal ways the trajectory space of epitaxial growth during molecular beam epitaxy. This paper reviews the fundamentals of trajectory morphing and presents results showing that trajectory morphing may be used to explore the trajectory space of an epitaxial thin film growth system. We have derived a simplified growth model, suitable for use in morphing, and this is also presented. are reviewed
Keywords :
differential equations; feedback; linear quadratic control; mathematical morphology; molecular beam epitaxial growth; nonlinear systems; optimisation; simulation; tracking; differential equations; epitaxial thin film growth; feedback; growth model; homotopy; linear quadratic control; molecular beam epitaxy; nonlinear systems; optimisation; tracking; trajectory morphing; trajectory space; Atomic layer deposition; Epitaxial growth; Molecular beam epitaxial growth; Semiconductor materials; Semiconductor process modeling; Semiconductor thin films; Space exploration; Substrates; Temperature; Transistors;
Conference_Titel :
American Control Conference, 1999. Proceedings of the 1999
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-4990-3
DOI :
10.1109/ACC.1999.782435
