Title :
Touch mode capacitive pressure sensors for industrial applications
Author :
Ko, Wen H. ; Wang, Qiang
Author_Institution :
Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
The principle, simulation, design, characteristics and application of touch mode capacitive pressure sensors for industrial applications, including embedded monitoring of tire pressure are presented. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure. The advantages of touch mode of operation are: near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment. When properly packaged, the device can be used to measure fluid now, force, acceleration, and displacement, etc. in industrial applications
Keywords :
acceleration measurement; capacitors; digital simulation; displacement measurement; electric sensing devices; finite element analysis; flow measurement; force measurement; microsensors; pressure sensors; simulation; acceleration measurement; characteristics; design; displacement measurement; embedded monitoring; force measurement; harsh industrial field environment; industrial applications; near linear output; over-range pressure; robust structure; simulation; tire pressure; touch mode capacitive pressure sensors; Capacitive sensors; Displacement measurement; Force measurement; Force sensors; Monitoring; Packaging; Robustness; Sensor phenomena and characterization; Tactile sensors; Tires;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581828
