Touch mode capacitive pressure sensors for industrial applications

Author

Ko, Wen H. ; Wang, Qiang

Author_Institution

Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA

fYear

1997

fDate

26-30 Jan 1997

Firstpage

284

Lastpage

289

Abstract

The principle, simulation, design, characteristics and application of touch mode capacitive pressure sensors for industrial applications, including embedded monitoring of tire pressure are presented. In touch mode operation, the diaphragm of the capacitive pressure sensor touches the substrate structure. The advantages of touch mode of operation are: near linear output, large over-range pressure and robust structure that make it capable to withstand harsh industrial field environment. When properly packaged, the device can be used to measure fluid now, force, acceleration, and displacement, etc. in industrial applications

Keywords

acceleration measurement; capacitors; digital simulation; displacement measurement; electric sensing devices; finite element analysis; flow measurement; force measurement; microsensors; pressure sensors; simulation; acceleration measurement; characteristics; design; displacement measurement; embedded monitoring; force measurement; harsh industrial field environment; industrial applications; near linear output; over-range pressure; robust structure; simulation; tire pressure; touch mode capacitive pressure sensors; Capacitive sensors; Displacement measurement; Force measurement; Force sensors; Monitoring; Packaging; Robustness; Sensor phenomena and characterization; Tactile sensors; Tires;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581828

Filename

581828