Title :
Flexural-plate-wave actuators based on PZT thin film
Author :
Luginbuhl, Ph. ; Collins, S.D. ; Racine, G.A. ; Gretillat, M.-A. ; de Rooij, N.F. ; Brooks, K.G. ; Setter, N.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
The fabrication and the characterization of a microfabricated acoustic Lamb wave device driven by a piezoelectric PZT (modified lead zirconate titanate) Pb(Zrx,Ti1-xO3) sol-gel thin film for use in mass transport, mass filtering and fluid delivery systems are presented. Ultrasonic Flexural-Plate-Waves (FPW) at frequencies in the MHz order, are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDT) patterned on a 0.75 μm thick piezoelectric ceramic PZT film which provides high acoustic power for physical translation of fluid and microparticles
Keywords :
filtration; flow control; interdigital transducers; lead compounds; mass transfer; microactuators; micropumps; piezoceramics; piezoelectric actuators; piezoelectric thin films; sol-gel processing; surface acoustic wave devices; surface acoustic wave transducers; ultrasonic transducers; 0.75 mum; 286 to 312 m/s; 374 to 454 m/s; MHz frequencies; PZT; PZT thin film; PbZrO3TiO3; Si; Si substrate; fabrication; flexural-plate-wave actuators; fluid delivery systems; fluid translation; group velocity; high acoustic power; interdigitated transducers; mass filtering; mass transport; microfabricated acoustic Lamb wave device; microparticle translation; micropump; phase velocity; piezoelectric ceramic PZT film; sol-gel thin film; thin acoustic composite membrane; ultrasonic flexural-plate-waves; Acoustic devices; Acoustic waves; Actuators; Fabrication; Filtering; Lead; Piezoelectric films; Thin film devices; Titanium compounds; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3744-1
DOI :
10.1109/MEMSYS.1997.581845
