Optical communication using micro corner cube reflectors

Author

Chu, Patrick B. ; Lo, Nanping R. ; Berg, Erik C. ; Pister, Kristofer S J

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

1997

fDate

26-30 Jan 1997

Firstpage

350

Lastpage

355

Abstract

Surface micromachined corner cube reflectors made of 250 μm square hinged polysilicon plates have been demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating 5 mW laser. Measured reflectance ranges from 34% to 77% for different mirror designs. Divergence of light reflected by CCR ranges from 15-35 mrad. The CCRs are electrostatically actuated with 10 to 20 V. The highest data rate transmitted with a CCR is 1 Kbps

Keywords

digital communication; electrostatic devices; microactuators; micromachining; mirrors; optical fabrication; optical links; optical testing; optical transmitters; reflectivity; semiconductor device testing; 1 kbit/s; 10 to 20 V; 2 m; 250 mum; 5 mW; Si; data rate; digital signal transmission; electrostatic actuation; laser reflection; micro corner cube reflectors; mirror design; optical bench tests; optical communication; optical wireless link; reflectance; reflected light divergence; square hinged polysilicon plates; surface micromachined corner cube reflectors; Actuators; Base stations; Costs; Frequency; Light sources; Mirrors; Optical fiber communication; Optical receivers; Optical transmitters; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on

Conference_Location

Nagoya

ISSN

1084-6999

Print_ISBN

0-7803-3744-1

Type

conf

DOI

10.1109/MEMSYS.1997.581852

Filename

581852