DocumentCode :
3428794
Title :
Superlubricity mechanism for micro electro mechanical systems
Author :
Hirano, Motohisa ; Kuwano, Hiroki ; Weijtmans, Johan Wilhelm
Author_Institution :
NTT Integrated Inf. & Energy Syst. Labs., Tokyo, Japan
fYear :
1997
fDate :
26-30 Jan 1997
Firstpage :
436
Lastpage :
441
Abstract :
A new regime of friction-superlubricity-where friction completely vanishes has recently been discovered. This paper discusses superlubricity mechanisms, which can be utilized for Micro Electro Mechanical Systems (MEMS), such as microvalves and micro-assembly systems. From studying friction properties such as the dependence of interfacial lattice misfits and of normal load, it is found that superlubricity is stable under high contact pressure conditions. Experimental evidence of superlubricity is presented by examining systems of sliding atomically clean surfaces by using ultra-high vacuum scanning tunneling microscopy. We have, consequently, proposed the methods for controlling friction and for bonding surfaces by using the superlubricity mechanisms
Keywords :
lubrication; micromechanical devices; scanning tunnelling microscopy; sliding friction; atomically clean surfaces; contact pressure conditions; friction properties; interfacial lattice misfits; micro electro mechanical systems; micro-assembly systems; microvalves; sliding; superlubricity mechanism; surface bonding; ultra-high vacuum scanning tunneling microscopy; Bonding; Friction; Lattices; Mechanical systems; Micromechanical devices; Microscopy; Microvalves; Surface cleaning; Tunneling; Vacuum systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on
Conference_Location :
Nagoya
ISSN :
1084-6999
Print_ISBN :
0-7803-3744-1
Type :
conf
DOI :
10.1109/MEMSYS.1997.581885
Filename :
581885
Link To Document :
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