LIGA-microtesting system with integrated strain gauges for force measurement

A microsystem is presented which is applied in bending experiments of cantilever microbeams to determine the Young´s modulus of electroplated materials used in the LIGA-process. The microsystem is manufactured by the LIGA technology combined with a sacrificial layer technique and the sacrificial structure technique. The system consists of a pneumatically driven microactuator, an optical position sensor, and a unit for specimen fixing. Strain gauges are integrated in the force transmitting unit of the actuator-a movable piston-for direct measurement of the forces transmitted to the specimen. The actuator allows the transmission of forces of several 10 mN and displacements of 100 μm and more. In this way, the first LIGA-made microsystem has been realized which combines a fluid driven microactuator with electrical and optical sensors for force and displacement measurement