Title :
Net-shape diamond growth: applications in optics and electronics
Author_Institution :
Gen. Phys. Inst., Acad. of Sci., Moscow, Russia
Abstract :
A direct growth of CVD diamond components in order to avoid (or minimize) further surface treatment is considered. This transfer molding technique is based on diamond growth on a patterned substrate, the replica of those patterns being formed on the nucleation side of the diamond film. If the diamond nucleation density is high enough to provide the conformal coating of the microstructured substrate surface the exact replica of the original structure after removal of the substrate can be produced.
Keywords :
conformal coatings; diamond; elemental semiconductors; nucleation; plasma CVD; semiconductor thin films; C; conformal coating; microwave plasma CVD; net-shape technology; nucleation; patterned substrate; surface treatment; transfer molding; Diffraction gratings; Electronic mail; Geometrical optics; Microwave devices; Optical arrays; Optical devices; Optical films; Optical surface waves; Physics; Substrates;
Conference_Titel :
Wide Bandgap Layers, 2001. Abstract Book. 3rd International Conference on Novel Applications of
Conference_Location :
Zakopane, Poland
Print_ISBN :
0-7803-7136-4
DOI :
10.1109/WBL.2001.946556
