DocumentCode
3429609
Title
Forming carbon films on cemented carbide surface using RF PCVD method
Author
Grabarczyk, J. ; Niedzielski, P. ; Louda, P.
Author_Institution
Div. of Thin Films, Tech. Univ. Lodz, Poland
fYear
2001
fDate
26-30 June 2001
Firstpage
110
Lastpage
111
Abstract
The aim of the project described in this paper was to examine the influence parameters of deposition and the method of location of samples on an RF-power electrode in the RF-PCVD method on the structure of carbon coatings, which covered cemented carbide substrates. This researches precedes an investigation concerning the covering of cemented carbide cutting tools by wear resistant carbon films, with were used in wood industry for milling of wood-base materials. As an object of investigation cutter head plates made of cemented carbide were used. Their size was about 30/spl times/12/spl times/1.5. In the deposition processes two types of parameters were applied: so-called "hard" parameters, when the bias voltage was higher then 500V, and "soft" parameters, when the bias voltage was less then 400V. In addition the flow of methane, pressure, and time of deposition were changed. In order to properly locate the cutting edge on the electrode three types of holders were used. Every process of depositing the carbon film on a cemented carbide substrate was preceded by one hour of ion etching.
Keywords
carbon; plasma CVD coatings; scanning electron microscopy; wear resistant coatings; 400 V; 500 V; C; C film; PECVD; WC; bias voltage; deposition parameters; wear resistant films; Building materials; Coatings; Cutting tools; Electrodes; Milling; Organic materials; Radio frequency; Substrates; Voltage; Wood industry;
fLanguage
English
Publisher
ieee
Conference_Titel
Wide Bandgap Layers, 2001. Abstract Book. 3rd International Conference on Novel Applications of
Conference_Location
Zakopane, Poland
Print_ISBN
0-7803-7136-4
Type
conf
DOI
10.1109/WBL.2001.946562
Filename
946562
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