Title :
Optical and structural properties of thin films of ZnS grown by atomic layer epitaxy
Author :
Guziewicz, E. ; Godlewski, M. ; Cricenti, A. ; Girasole, M. ; Kopalko, K. ; Szczerbakow, A.
Author_Institution :
Inst. of Phys., Polish Acad. of Sci., Warsaw, Poland
Abstract :
Summary form only given. We evaluate structural quality and surface morphology of ZnS films grown by ALE. We study influence of film morphology and of growth conditions on optical properties of these films. Results of atomic force microscopy (AFM), scanning electron (SEM) and cathodoluminescence (CL) microscopy and of photoluminescence (PL) investigations of ZnS layers grown on GaAs substrates by three different methods are discussed.
Keywords :
II-VI semiconductors; atomic force microscopy; atomic layer epitaxial growth; cathodoluminescence; photoluminescence; scanning electron microscopy; semiconductor epitaxial layers; semiconductor growth; surface structure; zinc compounds; AFM; ALE; GaAs; GaAs substrates; SEM; ZnS; atomic layer epitaxy; cathodoluminescence; photoluminescence; structural quality; surface morphology; thin films; Atom optics; Atomic force microscopy; Atomic layer deposition; Electron optics; Gallium arsenide; Optical films; Photoluminescence; Scanning electron microscopy; Surface morphology; Zinc compounds;
Conference_Titel :
Wide Bandgap Layers, 2001. Abstract Book. 3rd International Conference on Novel Applications of
Conference_Location :
Zakopane, Poland
Print_ISBN :
0-7803-7136-4
DOI :
10.1109/WBL.2001.946577
