Title :
Double PWM method for high voltage discharge energy control [wire bonding]
Author :
Chiba, Takamasa ; Yamashita, Tsutomu ; Chubachi, Noriyoshi
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
High voltage discharge technology is important in the process of semiconductor manufacture, especially in the electric torch wire bonding system. For the wire bonding technology, a precise diameter of balls is required to form on the end of Au wire by a high voltage discharge arc. This paper describes a double PWM method developed to control the high voltage discharge energy in connection with the diameter of the balls to be formed
Keywords :
PWM power convertors; high-voltage engineering; integrated circuit manufacture; lead bonding; power control; pulse generators; pulse transformers; spark machining; voltage control; Au; Au wire; arc noise rejection; double PWM method; electric torch wire bonding system; high voltage discharge arc; high voltage discharge energy control; optical fiber links; precise ball diameter; semiconductor manufacture; switching conversion step up method; Bonding; Current control; Fault location; Pulse amplifiers; Pulse circuits; Pulse generation; Pulse width modulation; Space vector pulse width modulation; Voltage control; Wire;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International
Conference_Location :
Omiya
Print_ISBN :
0-7803-3622-4
DOI :
10.1109/IEMT.1995.541048
