Title :
Analysis methods of circuit elements buried in ceramic multilayer substrate
Author :
Tochigi, Makoto ; Yoshida, Norio ; Oida, Toshifumi ; Tsuru, Teruhisa
Author_Institution :
Murata Manuf. Co. Ltd., Yasu, Japan
Abstract :
The measurement and modeling methods of multilayer devices buried in Ceramic Multilayer Functional Substrates (CMFS) are developed to improve the accuracy of simulation. For measurements, TRL, a 2-port calibration method and a microstrip test fixture were used. The equivalent circuit models consist of basic lumped circuit elements, and the values of elements are calculated using the Finite Element Method (FEM). We obtain the equivalent circuit model of the bypass (shunt) capacitor in good agreement with measured values
Keywords :
calibration; ceramic capacitors; ceramics; equivalent circuits; finite element analysis; lumped parameter networks; microstrip lines; microwave circuits; microwave measurement; substrates; 2-port calibration method; 800 MHz to 10 GHz; BaO-Al2O3-SiO2; FEM; LTCC materials; TRL; buried circuit elements; bypass capacitor; ceramic multilayer functional substrates; equivalent circuit models; lumped circuit elements; microstrip test fixture; modeling methods; multilayer devices; shunt capacitor; thru-reflect-line; Calibration; Ceramics; Circuit analysis; Circuit simulation; Circuit testing; Equivalent circuits; Finite element methods; Fixtures; Microstrip; Nonhomogeneous media;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International
Conference_Location :
Omiya
Print_ISBN :
0-7803-3622-4
DOI :
10.1109/IEMT.1995.541051
