Title :
ICMTS 2003. Proceedings of the 2003 International Conference on Microelectronic Test Structures (Cat. No.03CH37402)
Abstract :
The following topics are dealt with: CD metrology; MEMS and sensors; yield; RF; parameter extraction; reliability; capacitance; process characterization; and matching.
Keywords :
capacitance; impedance matching; integrated circuit reliability; integrated circuit yield; lithography; micromechanical devices; radiofrequency integrated circuits; sensors; CD metrology; MEMS; RF; capacitance; matching; parameter extraction; process characterization; reliability; sensors; yield;
Conference_Titel :
Microelectronic Test Structures, 2003. International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-7653-6
DOI :
10.1109/ICMTS.2003.1197354
