DocumentCode
3431001
Title
ICMTS 2003. Proceedings of the 2003 International Conference on Microelectronic Test Structures (Cat. No.03CH37402)
fYear
2003
fDate
17-20 March 2003
Abstract
The following topics are dealt with: CD metrology; MEMS and sensors; yield; RF; parameter extraction; reliability; capacitance; process characterization; and matching.
Keywords
capacitance; impedance matching; integrated circuit reliability; integrated circuit yield; lithography; micromechanical devices; radiofrequency integrated circuits; sensors; CD metrology; MEMS; RF; capacitance; matching; parameter extraction; process characterization; reliability; sensors; yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 2003. International Conference on
Conference_Location
Monterey, CA, USA
Print_ISBN
0-7803-7653-6
Type
conf
DOI
10.1109/ICMTS.2003.1197354
Filename
1197354
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