DocumentCode
3431285
Title
Revolution measurement of Novellus performance and capacity
Author
Chang, Yu Cheng ; Huang, Guey Bao ; Lee, Po Y. ; Liao, Miao Cheng
Author_Institution
Taiwan Semicond. Manuf. Co. Ltd., Hsin-Chu, Taiwan
fYear
2002
fDate
10-11 Dec. 2002
Firstpage
73
Lastpage
75
Abstract
Based on TOC (theory of constraint) concepts, this paper establishes a throughput forecast model to quickly get throughput by recipe parameter settings and find out the bottleneck in machine to raise the machine performance and capacity.
Keywords
constraint theory; machinery; production control; technological forecasting; Novellus performance; forecast model; machine performance; recipe parameter settings; revolution measurement; theory of constraints; throughput forecast model; Availability; Costs; Manufacturing industries; Predictive models; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Stability; Statistical analysis; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN
0-7803-7604-8
Type
conf
DOI
10.1109/SMTW.2002.1197371
Filename
1197371
Link To Document