Strategies of energy saving in a wafer fab

Author

Tsai, Chun-Hung ; Hsiao, Patrick ; Kuo, Rong-Chang ; Chang, Chung-Chieh ; Rao, Muchen ; Chang, Chin-Kuo ; Chung, Kung-Yao

Author_Institution

United Microelectron. Corp., Hsinchu, Taiwan

fYear

2002

fDate

10-11 Dec. 2002

Firstpage

85

Lastpage

89

Abstract

Energy saving on a semiconductor fab is a big issue from the cost reduction point of view. This paper summarizes some effective actions carried out in our fab. We found that lowering the temperature setting in the make-up air unit (MAU) outlet can save as much as NT$ 5.6 million per year. Adjusting the amount of exhaust of processing equipment to a reasonable level can also reduce large amounts of the running cost. Furthermore, adding heat recovery coils into a traditional MAU can reduce both cooling load and heating load. All the energy-saving actions can serve as valuable references to other semiconductor fabs.

Keywords

cost reduction; energy conservation; heat recovery; process heating; semiconductor device manufacture; cooling load; cost reduction; energy consumption; energy saving strategies; heat recovery coils; heating load; semiconductor fabrication; semiconductor manufacture; wafer fab; Coils; Cooling; Costs; Energy consumption; Environmental economics; Heat recovery; Heating; Microelectronics; Power generation economics; Temperature distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Technology Workshop, 2002

Print_ISBN

0-7803-7604-8

Type

conf

DOI

10.1109/SMTW.2002.1197375

Filename

1197375