• DocumentCode
    3431408
  • Title

    A new type of wide-range vacuum sensor

  • Author

    Deulin, Evgenii A. ; Galakhar, Alexander S. ; Basmanov, Mikhail S.

  • Author_Institution
    Bauman Moscow State Tech. Univ., Moscow
  • fYear
    2009
  • fDate
    10-13 Feb. 2009
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    This work is focused on simplification of a residual pressure measurement. The presented simple and reliable tribology based vacuum sensor allows measuring of the residual pressure in the range of 105 Pa to 10-10 Pa. It can substitute all other high and ultrahigh vacuum gauges with itself.
  • Keywords
    pressure measurement; sensors; vacuum gauges; residual pressure measurement; ultrahigh vacuum gauges; wide-range vacuum sensor; Friction; Gas detectors; Geometry; Mechanical engineering; Mechanical sensors; Pressure measurement; Region 8; Sensor phenomena and characterization; Silicon; Vacuum technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Technology, 2009. ICIT 2009. IEEE International Conference on
  • Conference_Location
    Gippsland, VIC
  • Print_ISBN
    978-1-4244-3506-7
  • Electronic_ISBN
    978-1-4244-3507-4
  • Type

    conf

  • DOI
    10.1109/ICIT.2009.4939520
  • Filename
    4939520
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3431408