Sorter automatic operations in a 300 mm fab

This paper demonstrates the approach of sorter automatic operations, which is integrated with an all-new mechanism, called "dynamic sub-route" in a 300 mm fab. Based on the advanced 300 mm fab operation features of allowing multiple lots in one carrier and multiple recipes within a carrier, this approach facilitates the automation of wafer split/merge and carriers exchange operations in fab daily activities. An automated sorter operation system that implements the approach is being developed in a local 300 mm mass production fab as a key component and driver toward the labor saving, miss operation reduction, and fully automated semiconductor manufacturing.