Experimental research and establishment of the model of the two-probe flatness error separation

In the time domain, on the basis of two-probe straightness error separation technology, this paper gives a new measurement measuring the flatness error based on the error separation technology - the two-probe flatness error separation measurement. It also gives the principle of the two-probe flatness error separation measurement, establishes the corresponding mathematical models, and carries on the simulation analysis and experiment testifying. Theoretical simulation and experimental result have proved the correctness and effectiveness of the separation principle (1) after analyzing the data with the two-probe error separation measurement, we can obtain the flatness of the panel measured as well as the straight error of the guiding rail.(2) when measuring with the two-probe measurement, the accumulation error of the initial position of the sensors is linear, so it can not influent the assessment of the error.(3) the two-probe error separation technology uses less one or two probes than the flatness error separation technology with the three or four probes does, so it need not consider installing several sensors on a plane and eliminates the problem made by the non-linear accumulation error of the initial position of the sensors. Therefore, the two-probe flatness error separation measurement this paper gives can make the flatness error separation technology more applied.