Process optimization and productivity improvement by real-time data collection system

Author

Luoh, Tuung ; Yang, Ling-Wuu ; Shih, Hsueh-Hao ; Huang, Chi-Tung ; Chen, Kuang-Chao ; Hwang, Yaw-Lin ; Hsueh, Calvin ; Chung, Henry

Author_Institution

Macronix Int. Co. Ltd., Hsinchu, Taiwan

fYear

2002

fDate

10-11 Dec. 2002

Firstpage

140

Lastpage

143

Abstract

Factory automation data management (FADM) system is a real-time computer control system. It can record all the process and hardware parameters during processing. The functions in the software include GUI, data communication, digital I/O, D/S control, etc. FADM was adopted in two single-wafer thermal process chambers, in-situ steam generation (ISSG) oxidation and LPCVD poly-silicon (POLYgen), to real-time monitoring the process parameters during processing. Mini-marathon tests for POLYgen and ISSG processes demonstrated that FADM could help engineers to obtain the process stability and its limitation. According to the FADM results, the chambers were retrofitted for process optimization.

Keywords

data acquisition; data handling; factory automation; graphical user interfaces; integrated circuit manufacture; process control; real-time systems; GUI software; LPCVD polysilicon; POLYgen; computer control system; digital I/O control; factory automation data management system; hardware parameter; in situ stream generation oxidation; process optimization; real-time system; single wafer thermal process chamber; Automatic control; Communication system control; Control systems; Data communication; Graphical user interfaces; Hardware; Manufacturing automation; Oxidation; Productivity; Real time systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Technology Workshop, 2002

Print_ISBN

0-7803-7604-8

Type

conf

DOI

10.1109/SMTW.2002.1197394

Filename

1197394