DocumentCode
343176
Title
Control of the Czochraski crystal growth process-almost disturbance decoupling with global asymptotic stability
Author
Bao, Xiangyu ; Lin, Zongli ; Zhang, Hui ; Prasad, Vish ; Shamash, Yacov
Author_Institution
Dept. of Electr. Eng., Virginia Univ., Charlottesville, VA, USA
Volume
3
fYear
1999
fDate
1999
Firstpage
1530
Abstract
The nonlinear heat-melt dynamics of a Czochralski crystal growth process is identified to be in the global normal form with globally, asymptotically stable zero dynamics. Nonlinear feedback laws are then constructed that achieve almost disturbance decoupling with global asymptotic stability at a desired operating point. The design relies on the recent developments in nonlinear control theory, and is in contrast with traditional crystal growth process control design methods which are based on linearization through Taylor series expansion and hence always result in stabilization results with unknown (possibly small) basin of attraction
Keywords
asymptotic stability; crystal growth from melt; dynamics; feedback; nonlinear control systems; process control; Czochralski process; almost disturbance decoupling; asymptotic stability; crystal growth; feedback; heat-melt dynamics; nonlinear control systems; process control; Art; Asymptotic stability; Control design; Control theory; Crystals; Educational institutions; Feedback control; Linear approximation; Process control; Taylor series;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 1999. Proceedings of the 1999
Conference_Location
San Diego, CA
ISSN
0743-1619
Print_ISBN
0-7803-4990-3
Type
conf
DOI
10.1109/ACC.1999.786081
Filename
786081
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