Standard free determination of trace metals in semiconductor chemicals by ICP-MS

This paper interprets quadrupole ICP-MS with PFA nebulizer for the spike recovery test of Na (sodium), Al (aluminum) and Cu (copper) in HF (hydrofluoric acid), BOE (buffer oxide etchant), APM (ammonia peroxide mixture) and HPM (hydrogen chloride peroxide mixture) by the direct sample introduction and analysis without matrix elimination procedure. The spike recoveries of Na, Al and Cu were all located in the range of 85%-115% with a 0.4 ppb spiked solution in various chemicals under the hot plasma mode. When using the semi-quantitative equation in the determination of unknown elements by standard reference to Na, Al would have good consistency between its measured value and calculated value.