Title :
Low Temperature Silicon Oxinitride Technology for Compact CMOS Compatible Planar Optical Devices
Author :
Bayat, Khadijeh ; Chaudhuri, Sujeet K. ; Safavi-Naeini, Saffiedin
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Waterloo, Waterloo, ON
Abstract :
We have developed a low temperature CMOS compatible silicon oxinitride based optical integrated circuit technology. The wide range of the refractive indices, 1.45-1.75, has been achieved which is applicable for compact planar optical waveguide devices.
Keywords :
CMOS integrated circuits; optical planar waveguides; refractive index; silicon compounds; SiON; compact CMOS compatible planar optical devices; compact planar optical waveguide devices; low temperature silicon oxinitride technology; optical integrated circuit technology; refractive indices; CMOS technology; Integrated circuit technology; Integrated optics; Optical devices; Optical planar waveguides; Optical refraction; Optical variables control; Optical waveguides; Silicon; Temperature;
Conference_Titel :
Optical Internet, 2007 and the 2007 32nd Australian Conference on Optical Fibre Technology. COIN-ACOFT 2007. Joint International Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-0-9775657-3-3
Electronic_ISBN :
978-0-9775657-3-3
DOI :
10.1109/COINACOFT.2007.4519157
