DocumentCode
3432313
Title
Implementation of Taiwan´s Semiconductor Equipment Evaluation and Qualification (SEEQ) project
Author
Wang, J.C. ; Ke, K.H. ; Wang, P.Y.
fYear
2002
fDate
10-11 Dec. 2002
Firstpage
234
Lastpage
237
Abstract
This paper discusses the issues developed in the planning of the upcoming Taiwan Semiconductor Equipment Evaluation and Qualification (SEEQ) project. Details about its background, motive, advantage and difficulty are depicted.
Keywords
electronics industry; equipment evaluation; marketing; planning; semiconductor device manufacture; Taiwans semiconductor equipment evaluation qualification; planning; Benchmark testing; Databases; Electronics industry; Fabrication; Industrial economics; Integrated circuit modeling; Laboratories; Machinery; Qualifications; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN
0-7803-7604-8
Type
conf
DOI
10.1109/SMTW.2002.1197428
Filename
1197428
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