DocumentCode
3432696
Title
Using knowledge management method to improve machine automation system in IC fab
Author
Yu, Richard ; Chiou, Noah ; Kuo, P.W.
fYear
2002
fDate
10-11 Dec. 2002
Firstpage
282
Lastpage
285
Abstract
This paper describes a framework of machine automation-designing improvement system and knowledge-management feedback mechanism. The authors discuss the need of machine automation system in IC fab including stable and zero bug operations. From the practical experience, they responded and solved 140 automation abnormal events in the period of 20 weeks. Among these cases, 9 cases contributed significantly to automation function improvement and future applications of the system. In addition, 10 events triggered automatic specification modification; and also increased the automation usage stability.
Keywords
factory automation; integrated circuit manufacture; knowledge management; manufacturing data processing; 20 week; IC fabrication; knowledge management; knowledge management feedback mechanism; machine automation; specification modification; zero bug operation; Computerized monitoring; Condition monitoring; Design automation; Failure analysis; Feedback; Humans; Knowledge management; Manufacturing automation; Production; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN
0-7803-7604-8
Type
conf
DOI
10.1109/SMTW.2002.1197448
Filename
1197448
Link To Document