Title :
Using knowledge management method to improve machine automation system in IC fab
Author :
Yu, Richard ; Chiou, Noah ; Kuo, P.W.
Abstract :
This paper describes a framework of machine automation-designing improvement system and knowledge-management feedback mechanism. The authors discuss the need of machine automation system in IC fab including stable and zero bug operations. From the practical experience, they responded and solved 140 automation abnormal events in the period of 20 weeks. Among these cases, 9 cases contributed significantly to automation function improvement and future applications of the system. In addition, 10 events triggered automatic specification modification; and also increased the automation usage stability.
Keywords :
factory automation; integrated circuit manufacture; knowledge management; manufacturing data processing; 20 week; IC fabrication; knowledge management; knowledge management feedback mechanism; machine automation; specification modification; zero bug operation; Computerized monitoring; Condition monitoring; Design automation; Failure analysis; Feedback; Humans; Knowledge management; Manufacturing automation; Production; Stability;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197448
