Title :
UPW´s membrane technology application trend on semiconductor
Author_Institution :
Vanguard Int. Semicond. Corp., Hsinchu, Taiwan
Abstract :
The semiconductor sector continues to play a vital role in the water treatment market. They focus on equipment technology that assists to achieve resource conservation, both in terms of reused water and reduced chemical consumption. The latest trend in water treatment emphasizes equipment that utilizes membrane-based technologies that are modular in design from a process unit perspective. These include reverse osmosis, micro-filtration, ultra-filtration, degasification membranes, and continuous electro-deionization (CEDI). This article focuses on UPW´s membrane technology vs. traditional tower technology and reviews various membrane-based technologies in detail and compares the advantages and disadvantages relative to traditional tower designs. The primary purpose of this article is to highlight pertinent design information to other professionals that deal with UPW such that the most up-to-date information is considered when designing for new or upgrade fab projects.
Keywords :
electronics industry; filtration; membranes; osmosis; water pollution control; water treatment; chemical consumption; chemical disposal; chemical distribution; continuous electro deionization; degasification membranes; floor space; microfiltration; reused water; reverse osmosis; semiconductor industry; semiconductor sector; tower technology; ultra filtration; ultra pure water membrane technology; water treatment; Biomembranes; Chemical technology; Costs; Electronic equipment manufacture; Impurities; Manufacturing processes; Poles and towers; Space technology; Water conservation; Water resources;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197451