Title :
SAW device application of diamond
Author :
Hikata, S.S. ; Nakahata, H. ; Higaki, K. ; Fuj, S. ; Kitabayashi, H. ; Tanabe, K. ; Seki, Y.
Author_Institution :
Itami Res. Labs., Sumitomo Electr. Ind. Ltd., Itami, Japan
Abstract :
Polycrystalline diamond has emerged as a very promising material for high frequency surface acoustic wave (SAW) devices because it has a highest acoustic wave velocity amongst all materials. Theoretical studies with various types of piezoelectric materials were also performed. By LiNbO3/diamond structure, high electro-mechanical coefficient can be expected with high SAW velocity. Also zero temperature coefficient filter can be expected by additional amorphous SiO2 deposition. The ZnO/diamond structure was successfully developed with late result on high frequency filter of 3.5 GHz by 0.75 μm inter-digital transducers on diamond. The varieties of material systems on SAW and advanced devices based on diamond will find broad applications on high frequency devices in future communication systems
Keywords :
acoustic materials; acoustic wave velocity; diamond; surface acoustic wave filters; 0.7 micron; 3.5 GHz; LiNbO3-C; LiNbO3/diamond structure; SAW device; SiO2; ZnO-C; ZnO/diamond structure; acoustic wave velocity; amorphous SiO2 deposition; communication system; electromechanical coefficient; high frequency filter; interdigital transducer; piezoelectric material; polycrystalline diamond; surface acoustic wave device; zero temperature coefficient filter; Acoustic materials; Acoustic waves; Amorphous materials; Filters; Frequency; Piezoelectric materials; Surface acoustic wave devices; Surface acoustic waves; Temperature; Zinc oxide;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International
Conference_Location :
Omiya
Print_ISBN :
0-7803-3622-4
DOI :
10.1109/IEMT.1995.541066
