DocumentCode :
3432856
Title :
A new in-situ optical probing method with an atomic scale resolution for thin film deposition: Surface photo-interference (SPI)
Author :
Nakamura, Y. ; Yamashita, T. ; Kobayashi, M. ; Kat, Y. ; Yoshikawa, A.
Author_Institution :
Dept. of Electr. & Electron. Eng., Chiba Univ., Japan
fYear :
1995
fDate :
4-6 Dec 1995
Firstpage :
387
Lastpage :
390
Abstract :
A new in-situ optical probing method with an atomic-scale resolution in thin film deposition and/or heteroepitaxial growth is proposed in this paper. The new method is named surface photo-interference (SPI) because it is essentially concerned with a photo-interference in the deposited layer. The principle of the SPI is as follows; the complex refractive indices of the atomic or molecular layers, which alternately appear on top of the surface during film deposition and/or heteroepitaxy, greatly affect the total phase-shift of probing light during propagation in the epilayer, resulting in the change in the photo-interference signal intensity. The experimental setup of the method is very similar to that for another optical probing method called surface photo-absorption (SPA), but the principle is quite different between those two. One of the features of the SPI is that the experimental setup is quite simple and inexpensive though it is quite useful in real time monitoring of the thin film deposition
Keywords :
epitaxial growth; light interferometry; thin films; atomic scale resolution; heteroepitaxial growth; in-situ optical probing; real time monitoring; surface photo-interference; thin film deposition; Atom optics; Atomic layer deposition; Epitaxial growth; Monitoring; Optical beams; Optical films; Optical refraction; Optical variables control; Semiconductor films; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International
Conference_Location :
Omiya
Print_ISBN :
0-7803-3622-4
Type :
conf
DOI :
10.1109/IEMT.1995.541068
Filename :
541068
Link To Document :
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