Title :
Micromachining of bulk glass with tightly-focused femtosecond laser pulses
Author :
Schaffer, Chris B. ; Brodeur, André ; García, José F. ; Mazur, Eric
Author_Institution :
Dept. of Phys., Harvard Univ., Cambridge, MA, USA
Abstract :
Summary from only given. By focusing femtosecond laser pulses with high numerical-aperture microscope objectives, we micromachine optical glass using energies that are in the range of modern laser oscillators. When a femtosecond laser pulse is tightly focused inside a transparent material, energy deposition occurs only at the focus, where the laser intensity is high enough to cause absorption through nonlinear processes. When enough energy is deposited, the material is damaged and a localized change in the index of refraction is produced. By scanning the focus through the sample, very precise, three-dimensional microstructuring can be achieved
Keywords :
laser materials processing; micromachining; nonlinear optics; optical fabrication; optical focusing; optical glass; optical microscopes; bulk glass micromachining; energy deposition; femtosecond laser pulse; femtosecond laser pulse focusing; index of refraction; laser intensity; modern laser oscillators; nonlinear processes; numerical-aperture microscope objectives; optical focusing; optical glass; optical scanning; three-dimensional microstructuring; tightly focused; tightly-focused femtosecond laser pulses; transparent material; Glass; Laser modes; Micromachining; Nonlinear optics; Optical materials; Optical microscopy; Optical pulses; Optical refraction; Pulsed laser deposition; Ultrafast optics;
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5634-9
DOI :
10.1109/LEOS.1999.813539