Title :
Experimental determination of the importance of inductance in sub-micron microstrip lines
Author :
Friar, R.J. ; Neikirk, D.P.
Author_Institution :
Electr. Eng. Res. Lab., Texas Univ., Austin, TX, USA
Abstract :
The importance of inductance in sub-micron cross-section interconnect lines is examined. We experimentally show that small cross-section, high-loss lines are RC dominated into the low GHz frequency range, and only begin to exhibit inductive effects above 10 GHz. We also show by comparing experimental data and a simple model that the skin effect and substrate effects are small, if present, in these lines up to 40 GHz
Keywords :
MMIC; inductance; integrated circuit interconnections; integrated circuit metallisation; integrated circuit modelling; integrated circuit testing; microstrip lines; skin effect; 10 GHz; 40 GHz; RC dominated lines; high-loss lines; inductance; inductive effects; interconnect line cross section; interconnect lines; microstrip lines; skin effect; substrate effects; Capacitance; Frequency; Impedance; Inductance; Laboratories; Microelectronics; Microstrip; Scattering parameters; Skin effect; Transmission lines;
Conference_Titel :
Interconnect Technology, 1999. IEEE International Conference
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5174-6
DOI :
10.1109/IITC.1999.787114
