• DocumentCode
    3434465
  • Title

    Preparation and characterization of piezoelectric (Pb0.76Ca0.24)TiO3 films

  • Author

    Guo, H.Y. ; Wilson, Ian H. ; Xu, J.B.

  • Author_Institution
    Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Shatin, China
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    68
  • Lastpage
    70
  • Abstract
    Tetragonal (Pb0.76Ca0.24)TiO3 thin films have been prepared on Pt-Ti-SiO2-Si substrates using sol-gel processing. Besides XRD, SEM and AFM characterization, ferroelectric hysteresis loop and dielectric measurements were used to characterize the electric properties. Piezoelectric-mode AFM was also used to investigate local ferroelectric switching. Experimental results show that the films are pure perovskite with a dense structure and small surface roughness. A high contrast in ferroelectric switching image was obtained. This is attributed to the large electrostriction coefficient and weak clamping effect from the substrate which is related with high piezoelectric anisotropy of this material. The discrepancy between the values of coercive fields from micro and macro measurement is attributed to the nonuniform distribution of electric field in the film in local measurement
  • Keywords
    X-ray diffraction; atomic force microscopy; calcium compounds; dielectric hysteresis; dielectric losses; electrostriction; ferroelectric switching; lead compounds; permittivity; piezoelectric thin films; scanning electron microscopy; sol-gel processing; surface topography; AFM; Pb0.76Ca0.24TiO3-Pt-Ti-SiO2 -Si; Pt-Ti-SiO2-Si; Pt-Ti-SiO2-Si substrates; SEM; XRD; clamping effect; coercive fields; dense structure; dielectric measurements; electric properties; electrostriction coefficient; ferroelectric hysteresis loop measurements; ferroelectric switching image contrast; local ferroelectric switching; macro measurement; micro measurement; nonuniform electric field distribution; piezoelectric Pb0.76Ca0.24TiO3 films; piezoelectric anisotropy; piezoelectric-mode AFM; pure perovskite films; sol-gel processing; surface roughness; tetragonal Pb0.76Ca0.24TiO3 thin films; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electric variables measurement; Ferroelectric films; Ferroelectric materials; Hysteresis; Piezoelectric films; Rough surfaces; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2001. Proceedings. 2001 IEEE Hong Kong
  • Conference_Location
    Hong Kong
  • Print_ISBN
    0-7803-6714-6
  • Type

    conf

  • DOI
    10.1109/HKEDM.2001.946920
  • Filename
    946920