Title :
Preparation and characterization of piezoelectric (Pb0.76Ca0.24)TiO3 films
Author :
Guo, H.Y. ; Wilson, Ian H. ; Xu, J.B.
Author_Institution :
Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Shatin, China
Abstract :
Tetragonal (Pb0.76Ca0.24)TiO3 thin films have been prepared on Pt-Ti-SiO2-Si substrates using sol-gel processing. Besides XRD, SEM and AFM characterization, ferroelectric hysteresis loop and dielectric measurements were used to characterize the electric properties. Piezoelectric-mode AFM was also used to investigate local ferroelectric switching. Experimental results show that the films are pure perovskite with a dense structure and small surface roughness. A high contrast in ferroelectric switching image was obtained. This is attributed to the large electrostriction coefficient and weak clamping effect from the substrate which is related with high piezoelectric anisotropy of this material. The discrepancy between the values of coercive fields from micro and macro measurement is attributed to the nonuniform distribution of electric field in the film in local measurement
Keywords :
X-ray diffraction; atomic force microscopy; calcium compounds; dielectric hysteresis; dielectric losses; electrostriction; ferroelectric switching; lead compounds; permittivity; piezoelectric thin films; scanning electron microscopy; sol-gel processing; surface topography; AFM; Pb0.76Ca0.24TiO3-Pt-Ti-SiO2 -Si; Pt-Ti-SiO2-Si; Pt-Ti-SiO2-Si substrates; SEM; XRD; clamping effect; coercive fields; dense structure; dielectric measurements; electric properties; electrostriction coefficient; ferroelectric hysteresis loop measurements; ferroelectric switching image contrast; local ferroelectric switching; macro measurement; micro measurement; nonuniform electric field distribution; piezoelectric Pb0.76Ca0.24TiO3 films; piezoelectric anisotropy; piezoelectric-mode AFM; pure perovskite films; sol-gel processing; surface roughness; tetragonal Pb0.76Ca0.24TiO3 thin films; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electric variables measurement; Ferroelectric films; Ferroelectric materials; Hysteresis; Piezoelectric films; Rough surfaces; X-ray scattering;
Conference_Titel :
Electron Devices Meeting, 2001. Proceedings. 2001 IEEE Hong Kong
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-6714-6
DOI :
10.1109/HKEDM.2001.946920