• DocumentCode
    3434553
  • Title

    Hartmann screen test for measurement of stress during thin film deposition

  • Author

    Wilksch, Philip ; Forouzandeh, Farhad

  • Author_Institution
    Sch. of Appl. Sci., RMIT Univ., Melbourne, VIC
  • fYear
    2006
  • fDate
    10-13 July 2006
  • Firstpage
    6
  • Lastpage
    6
  • Abstract
    The Hartmann screen test for measuring changes in curvature of a surface has been adapted to create a system for continuous in situ monitoring of the internal stress in thin films during plasma deposition.
  • Keywords
    internal stresses; materials testing; plasma deposited coatings; stress measurement; thin films; Hartmann screen test; internal stress; plasma deposition; stress measurement; thin film deposition; Apertures; Focusing; Internal stresses; Laser beams; Plasma displays; Plasma measurements; Sputtering; Stress measurement; Surface fitting; System testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fibre Technology/Australian Optical Society, 2006. ACOFT/AOS 2006. Australian Conference on
  • Conference_Location
    Melbourne, VIC
  • Print_ISBN
    978-0-9775657-1-9
  • Electronic_ISBN
    978-0-9775657-1-9
  • Type

    conf

  • DOI
    10.1109/ACOFT.2006.4519323
  • Filename
    4519323
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3434553