A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter

Author

Allidina, K. ; Taghvaei, M.A. ; Nabki, F. ; Cicek, P.-V. ; El-Gamal, M.N.

Author_Institution

McGill Univ., Montreal, QC, Canada

fYear

2009

fDate

13-16 Dec. 2009

Firstpage

583

Lastpage

586

Abstract

This paper presents a MEMS resonator-based vacuum sensor with a low power transimpedance amplifier and PLL-based frequency-to-voltage converter. The MEMS resonator is fabricated in a CMOS-compatible process, and a 90 nm CMOS technology is used to design the integrated circuitry. The vacuum sensor has a range from 10 mbar to 1200 mbar and a resolution of less than 5 mbar. The simulated power consumption of the entire system is less than 520 Â¿W from a 1 V supply.

Keywords

CMOS analogue integrated circuits; low-power electronics; micromechanical resonators; microsensors; operational amplifiers; phase locked loops; vacuum microelectronics; voltage-frequency convertors; CMOS technology; MEMS resonator; PLL frequency-to-voltage converter; low power transimpedance amplifier; pressure 10 mbar to 1200 mbar; simulated power consumption; size 90 nm; vacuum sensor; voltage 1 V; Capacitive sensors; Circuits; Clocks; Energy consumption; Frequency conversion; Mechanical sensors; Micromechanical devices; Phase locked loops; Resonance; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Circuits, and Systems, 2009. ICECS 2009. 16th IEEE International Conference on

Conference_Location

Yasmine Hammamet

Print_ISBN

978-1-4244-5090-9

Electronic_ISBN

978-1-4244-5091-6

Type

conf

DOI

10.1109/ICECS.2009.5410846

Filename

5410846