Reliability evaluation of lithography machines using an customer satisfaction index

Author

Longlong Zhang ; Dashuang Luo ; Jing Li ; Hong-Zhong Huang ; Yu Liu

Author_Institution

Sch. of Mech., Electron., & Ind. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2013

fDate

15-18 July 2013

Firstpage

213

Lastpage

216

Abstract

Reliability evaluation can help designers to judge quality levels of products and improve their design. This paper evaluates reliability with considering customer satisfaction index (CSI). CSI is widely used in the field of economics to evaluate economic performance and feasibility. Using CSI and fuzzy synthetic assessment (FSA), we can get a satisfaction level about lithography machine. Five main factors were taken into account while building this model to evaluate lithography machine. Expert knowledge is considered to get values of these factors.

Keywords

customer satisfaction; expert systems; fuzzy set theory; lithography; product design; product quality; production engineering computing; production equipment; reliability; customer satisfaction index; economic performance; expert knowledge; fuzzy synthetic assessment; lithography machines; product design; product quality; reliability evaluation; Customer satisfaction; Economics; Educational institutions; Indexes; Lithography; Reliability engineering; customer satisfaction index; expert knowledge; lithography machine; reliability evaluation;

fLanguage

English

Publisher

ieee

Conference_Titel

Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE), 2013 International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4799-1014-4

Type

conf

DOI

10.1109/QR2MSE.2013.6625568

Filename

6625568