DocumentCode
3435786
Title
DG summary: FEOL discussion
Author
Stathis, Jim ; Southwick, Richard
Author_Institution
IBM
fYear
2012
fDate
14-18 Oct. 2012
Firstpage
216
Lastpage
216
Abstract
The DG on front-end of the line reliability took place on the evening of Oct. 16, 2012, with approximately twenty attendees from both academia and industry.
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
Conference_Location
South Lake Tahoe, CA, USA
ISSN
1930-8841
Print_ISBN
978-1-4673-2749-7
Type
conf
DOI
10.1109/IIRW.2012.6468963
Filename
6468963
Link To Document