• DocumentCode
    3435860
  • Title

    Discussion group: Extrinsic breakdown characteristics: How to avoid them — How to detect them ?

  • Author

    Martin, Andreas ; Aal, Andreas

  • Author_Institution
    Corporate reliability department, Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg, Germany
  • fYear
    2012
  • fDate
    14-18 Oct. 2012
  • Firstpage
    222
  • Lastpage
    223
  • Abstract
    Integrated circuits are complex with up to billions of devices. Intrinsic device characteristics are easy to monitor with reasonable sample sizes. However extrinsic fails are not that easy to monitor. Required failure rates are approaching zero with a “ZERO DEFECT” strategy. But also the verification of single digit ppm failure rates require enormous measurement resources to detect some extrinsics and in a second step to avoid them. At the end of the day the extrinsic fails “hurt” the semiconductor manufacturer. Therefore the investigation into extrinsics is absolutely necessary and the discussion point of this group. How can the extrinsics being detected for all the different process reliability topics, such as breakdown of gate oxides or other dielectrics, negative bias temperature instability, electromigration, hot carrier degradation, plasma induced damage, via integrity etc. In a second step the task is to avoid these extrinsics. How can we achieve this? Can continuous process improvement, product screening/burn in, intelligent circuitry with redundancy or self-repair help?
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
  • Conference_Location
    South Lake Tahoe, CA, USA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4673-2749-7
  • Type

    conf

  • DOI
    10.1109/IIRW.2012.6468967
  • Filename
    6468967