DocumentCode :
3435860
Title :
Discussion group: Extrinsic breakdown characteristics: How to avoid them — How to detect them ?
Author :
Martin, Andreas ; Aal, Andreas
Author_Institution :
Corporate reliability department, Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg, Germany
fYear :
2012
fDate :
14-18 Oct. 2012
Firstpage :
222
Lastpage :
223
Abstract :
Integrated circuits are complex with up to billions of devices. Intrinsic device characteristics are easy to monitor with reasonable sample sizes. However extrinsic fails are not that easy to monitor. Required failure rates are approaching zero with a “ZERO DEFECT” strategy. But also the verification of single digit ppm failure rates require enormous measurement resources to detect some extrinsics and in a second step to avoid them. At the end of the day the extrinsic fails “hurt” the semiconductor manufacturer. Therefore the investigation into extrinsics is absolutely necessary and the discussion point of this group. How can the extrinsics being detected for all the different process reliability topics, such as breakdown of gate oxides or other dielectrics, negative bias temperature instability, electromigration, hot carrier degradation, plasma induced damage, via integrity etc. In a second step the task is to avoid these extrinsics. How can we achieve this? Can continuous process improvement, product screening/burn in, intelligent circuitry with redundancy or self-repair help?
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
Conference_Location :
South Lake Tahoe, CA, USA
ISSN :
1930-8841
Print_ISBN :
978-1-4673-2749-7
Type :
conf
DOI :
10.1109/IIRW.2012.6468967
Filename :
6468967
Link To Document :
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