Transverse mode electrostatic microactuator for MEMS-based HDD slider

Author

Imamura, Takahiro ; Koshikawa, Takao ; Katayama, Masaki

Author_Institution

File Memory Lab., Fujitsu Labs. Ltd., Atsugi, Japan

fYear

1996

fDate

11-15 Feb 1996

Firstpage

216

Lastpage

221

Abstract

In this paper, we propose a new head slider concept for hard disk drives (HDDs) which will be completely batch-fabricated on a sacrificial layer together with a transverse mode electrostatic microactuator using MEMS-based technology. We present the design, fabrication, and testing of a prototype electrostatic microactuator in transverse mode without a slider body just to determine the basic characteristics. Test results showed a stroke of 0.55 μm and a very high mechanical resonant frequency of 34 kHz due to the low moving mass of 0.85 μg and the large force, estimated to be 23.5 μN, generated by the actuator

Keywords

electrostatic devices; hard discs; magnetic recording; microactuators; semiconductor device testing; 0.85 mug; 34 kHz; MEMS-based HDD slider; batch fabrication; hard disk drives; head positioning accuracy; head slider; high mechanical resonant frequency; large force; moving mass; sacrificial layer; stroke; test results; transverse mode electrostatic microactuator; Actuators; Electrostatics; Fabrication; Hard disks; Magnetic heads; Microactuators; Prototypes; Resonant frequency; Servomechanisms; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493983

Filename

493983