Title :
Transverse mode electrostatic microactuator for MEMS-based HDD slider
Author :
Imamura, Takahiro ; Koshikawa, Takao ; Katayama, Masaki
Author_Institution :
File Memory Lab., Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
In this paper, we propose a new head slider concept for hard disk drives (HDDs) which will be completely batch-fabricated on a sacrificial layer together with a transverse mode electrostatic microactuator using MEMS-based technology. We present the design, fabrication, and testing of a prototype electrostatic microactuator in transverse mode without a slider body just to determine the basic characteristics. Test results showed a stroke of 0.55 μm and a very high mechanical resonant frequency of 34 kHz due to the low moving mass of 0.85 μg and the large force, estimated to be 23.5 μN, generated by the actuator
Keywords :
electrostatic devices; hard discs; magnetic recording; microactuators; semiconductor device testing; 0.85 mug; 34 kHz; MEMS-based HDD slider; batch fabrication; hard disk drives; head positioning accuracy; head slider; high mechanical resonant frequency; large force; moving mass; sacrificial layer; stroke; test results; transverse mode electrostatic microactuator; Actuators; Electrostatics; Fabrication; Hard disks; Magnetic heads; Microactuators; Prototypes; Resonant frequency; Servomechanisms; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493983
