Title :
(Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering
Author :
Araki, T. ; Okabe, M.
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Japan
Abstract :
Thin film magnets are important materials for magnetic rotors used in micro-electromagnetic devices. We examined the magnetic properties of (Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering on the composition and conditions of deposition. We obtained perpendicular magnetization (Nd0.94Tb0.06)13Fe73 B14 film with a thickness of 10 μm and maximum energy produce of 190 kJ/m3. We also developed a magnetic rotor with a cylindrical thin film magnet for a micromotor having radial gap. This rotor was formed by depositing the 10 μm-thick perpendicular magnetization film on the side wall of a 340 μm-diameter shaft. It was suggested that this rotor had radial magnetization
Keywords :
boron alloys; iron alloys; magnetic thin film devices; magnetisation; micromotors; neodymium alloys; permanent magnet motors; permanent magnets; rotors; sputtered coatings; terbium alloys; thin film devices; (Nd,Tb)-Fe-B thin film magnets; (Nd0.94Tb0.06)13Fe73B 14; (Nd0.94Tb0.06)13Fe73B 14 film; (NdTb)-Fe-B; 10 mum; 340 mum; composition; cylindrical thin film magnet; magnetic rotor; magnetic rotors; magnetron sputtering; micro-electromagnetic devices; perpendicular magnetization; radial magnetization; thin film magnets; Iron; Magnetic devices; Magnetic films; Magnetic materials; Magnetic properties; Magnetization; Magnets; Neodymium; Sputtering; Thin film devices;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493988
