Thermal characterization of thin film superlattice micro refrigerators

Author

Christofferson, James ; Vashaee, Daryoosh ; Shakouri, Ali ; Fan, Xiaofeng ; Zeng, Gehong ; LaBounty, Chris ; Bowers, John E. ; Croke, Edward T., III

Author_Institution

Jack Baskin Sch. of Eng., California Univ., Santa Cruz, CA, USA

fYear

2000

fDate

2000

Firstpage

49

Lastpage

54

Abstract

Micro refrigerators based on thin film SiGe/Si superlattices are investigated. Cooling performance of 2.7 degrees at room temperature and 10.8 degrees at 200 C has been measured. Cooling characterization was done using micro thermocouples, and also with the use of visible wavelength thermoreflectance method. Reflectance images of the temperature distribution are presented with spatial resolution better than traditional infrared cameras

Keywords

Ge-Si alloys; cooling; elemental semiconductors; refrigeration; semiconductor materials; semiconductor superlattices; silicon; spectral methods of temperature measurement; temperature distribution; thermal analysis; thermoreflectance; 20 C; 200 C; Si-GeSi; cooling characterization; cooling performance; micro thermocouples; reflectance images; room temperature; spatial resolution; temperature distribution; thermal characterization; thin film SiGe/Si superlattices; thin film superlattice micro refrigerators; visible wavelength thermoreflectance; Cooling; Germanium silicon alloys; Refrigerators; Semiconductor thin films; Silicon germanium; Superlattices; Temperature; Thermoreflectance; Transistors; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Compound Semiconductors, 2000 IEEE International Symposium on

Conference_Location

Monterey, CA

Print_ISBN

0-7803-6258-6

Type

conf

DOI

10.1109/ISCS.2000.947127

Filename

947127