Title :
Thermal characterization of thin film superlattice micro refrigerators
Author :
Christofferson, James ; Vashaee, Daryoosh ; Shakouri, Ali ; Fan, Xiaofeng ; Zeng, Gehong ; LaBounty, Chris ; Bowers, John E. ; Croke, Edward T., III
Author_Institution :
Jack Baskin Sch. of Eng., California Univ., Santa Cruz, CA, USA
Abstract :
Micro refrigerators based on thin film SiGe/Si superlattices are investigated. Cooling performance of 2.7 degrees at room temperature and 10.8 degrees at 200 C has been measured. Cooling characterization was done using micro thermocouples, and also with the use of visible wavelength thermoreflectance method. Reflectance images of the temperature distribution are presented with spatial resolution better than traditional infrared cameras
Keywords :
Ge-Si alloys; cooling; elemental semiconductors; refrigeration; semiconductor materials; semiconductor superlattices; silicon; spectral methods of temperature measurement; temperature distribution; thermal analysis; thermoreflectance; 20 C; 200 C; Si-GeSi; cooling characterization; cooling performance; micro thermocouples; reflectance images; room temperature; spatial resolution; temperature distribution; thermal characterization; thin film SiGe/Si superlattices; thin film superlattice micro refrigerators; visible wavelength thermoreflectance; Cooling; Germanium silicon alloys; Refrigerators; Semiconductor thin films; Silicon germanium; Superlattices; Temperature; Thermoreflectance; Transistors; Wavelength measurement;
Conference_Titel :
Compound Semiconductors, 2000 IEEE International Symposium on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-6258-6
DOI :
10.1109/ISCS.2000.947127
