A multi-level, LIGA-like process for three dimensional actuators

Author

Massoud-Ansari, S. ; Mangat, P.S. ; Klein, John ; Guckel, H.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

285

Lastpage

289

Abstract

Design and fabrication of an electrostatic vertical actuator is reported. This actuator has been constructed using a multi-level, LIGA-like process. The process uses diamond lapping and polishing for replanarization of electroplated surfaces after the first LIGA cycle. This allows a second layer of photoresist to be bonded to the surface and therefore a second LIGA cycle can follow. In this actuator, force outputs in the milli-Newton range, and a vertical displacement of hundreds of microns appear to be feasible

Keywords

X-ray lithography; X-ray masks; electroforming; electrolytic polishing; electrostatic devices; microactuators; micromachining; photoresists; polishing; LIGA cycle; aligned X-ray mask; diamond lapping; electroplated surfaces; electrostatic vertical actuator; microactuator; multi-level LIGA-like process; parasitic capacitances; polishing; replanarization; second photoresist layer; solvent bonded; springs; table top actuator; three dimensional actuators; Bonding forces; Degradation; Electrostatic actuators; Fabrication; Lapping; Planarization; Resists; Solvents; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493995

Filename

493995