Title :
Development of mass productive micro stereo lithography (Mass-IH process)
Author :
Ikuta, Koji ; Ogata, Tsutkasa ; Tsubio, Masahiro ; Kojima, Syunsuke
Author_Institution :
Sch. of Eng., Nagoya Univ., Japan
Abstract :
Mass productive 3D micro fabrication process based on micro stereo lithography is proposed and verified experimentally. By using an array of micro optical fibers, a new multi-beam scanning method with high accuracy can be obtained in the whole fabrication area. Since this technique is based on the “IH process” developed (Ikuta et al., MEMS´93, 94), it was named “Mass-IH process”. This process enables us to fabricate MIFS (Micro INtegrated Fluid System) under mass and low cost production similar to silicon process. Future applications of MIFS for Biochemical LSI” and “Biochemical Computer” along with biomedical devices are described
Keywords :
arrays; biocomputers; biocontrol; biomedical equipment; biotechnology; chemical technology; fibre optic sensors; fluidic devices; microactuators; micromachining; microsensors; photolithography; 3D micro fabrication process; IH process; Mass-IH process; UV curable polymer; array of micro optical fibers; biochemical LSI; biochemical computer; biomedical devices; biotechnology; high aspect ratio; hybridization; mass productive micro stereo lithography; micro chemomechatronics; micro integrated fluid system; micropipes; multi-beam scanning method; Application software; Biomedical computing; Costs; Lithography; Mass production; Optical arrays; Optical device fabrication; Optical fibers; Production systems; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.493998
