Micromachined diffuser/nozzle elements for valve-less pumps

Author

Olsson, Anders ; Stemme, Göran ; Stemme, Erik

Author_Institution

Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden

fYear

1996

fDate

11-15 Feb 1996

Firstpage

378

Lastpage

383

Abstract

We present an investigation of the flow directing properties of several micromachined diffuser elements with different lengths and opening angles for valve-less micropumps. The lengths of the diffusers are from 1.45 to 3.95 mm and the half-elliptic cross-sections about 30×100 μm. Analytical results are compared to experimental results on individual diffuser chips and diffusers in a pump chip. The diffuser elements were fabricated in silicon and glass using isotropic and anisotropic etching and anodic bonding

Keywords

etching; flow control; micromachining; micropumps; nozzles; wafer bonding; 1.45 to 3.95 mm; 100 micron; 30 micron; Si; anisotropic etching; anodic bonding; diffuser chips; efficiency; flow directing properties; flow losses; isotropic etching; microfluidic systems; micromachined diffuser elements; micromachined nozzle elements; pressure drop; pump chip; turbulent flow; valveless micropumps; volume flow; Anisotropic magnetoresistance; Bonding; Costs; Data analysis; Etching; Glass; Microfluidics; Micropumps; Sensor systems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.494011

Filename

494011