A micromotion amplifier

Author

Huang, X.T. ; Saif, M.T. ; MacDonald, N.C.

Author_Institution

Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

424

Lastpage

428

Abstract

A micromotion amplifier has been designed and characterized. Large displacements are produced when long beams are buckled by an axial loading actuator motion of 1-2 μm. This buckling amplifies the small displacement and generates motions on the order of 100 μm. The displacement is stabilized by proper choice of asymmetry in the buckling beams. Devices based on this method have been designed, fabricated and successfully tested to have substantial displacements. Theoretical modeling and finite element method (FEM) analysis predicted the relation between the loading actuator motion and the amplified motion

Keywords

buckling; displacement control; elemental semiconductors; finite element analysis; microactuators; silicon; 1 to 2 mum; 100 mum; SCREAM; Si; amplified motion; asymmetry; axial loading actuator; displacements; fabrication; finite element method; loading actuator motion; micromotion amplifier; theoretical modeling; Atomic force microscopy; Capacitors; Design methodology; Electrostatic actuators; Microactuators; Motion analysis; Nanofabrication; Predictive models; Springs; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.494019

Filename

494019