DocumentCode :
3436928
Title :
Fast mixing by lamination
Author :
Branebjerg, Jens ; Gravesen, Peter ; Krog, Jens Peter ; Nielsen, Claus Rye
Author_Institution :
Danfoss A.S., Nordborg, Denmark
fYear :
1996
fDate :
11-15 Feb 1996
Firstpage :
441
Lastpage :
446
Abstract :
A micro mixer based on multi-stage multi-layer lamination is presented. The micro mixer has been designed as an integrated part of a micromachined chemical analysis system. The fabrication technology is based on wet chemical etching of PYREX-glass and silicon substrates which are subsequently bonded anodically. The micro mixer is designed to work in the flow range 1-10 μl/min with a Reynolds number less than 1 and an undisturbed laminal flow pattern. Comprehensive theoretical studies and computer simulations have been carried out in order to understand the detailed flow behaviour and diffusion in the mixer, and to set up design criteria needed to obtain perfect or near perfect multi-layer lamination. As a result of the study of a generic type of micro mixer and flow simulations, the need of a “separation plate” inside each mixer stage is revealed. The performance of micro machined single stage mixers has been verified by mixing experiments using the fast reaction of phenol-red and an acid. The experimental set-up takes advantage of the transparent PYREX-glass plate offering the possibility to study mixing phenomena by video microscopy
Keywords :
chemical analysis; digital simulation; elemental semiconductors; etching; flow simulation; fluid dynamics; glass; laminar flow; materials preparation; micromechanical devices; microscopy; mixing; optical microscopy; physics computing; semiconductor technology; silicon; simulation; stratified flow; Reynolds number; Si; computer simulation; fabrication technology; fast mixing; flow behaviour; flow simulation; integrated part; lamination; micro mixer; micromachined chemical analysis; multi-stage multi-layer lamination; phenol-red; separation plate; single stage mixer; transparent PYREX-glass plate; undisturbed laminal flow pattern; video microscopy; wet chemical etching; Bonding; Chemical analysis; Chemical technology; Computational modeling; Computer simulation; Fabrication; Lamination; Microscopy; Silicon; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
Type :
conf
DOI :
10.1109/MEMSYS.1996.494022
Filename :
494022
Link To Document :
بازگشت