Title :
Plasma Polymers Obtained From Hexamethylisiloxane As Sorptive Layers For Humidity Sensors
Author :
Radeva, E. ; Bobev, K.
Author_Institution :
Institute of Solid State Physics, Bulgarian Academy of Sciences
Keywords :
Glow discharges; Humidity measurement; Nuclear and plasma sciences; Physics; Plasma density; Plasma measurements; Plasma properties; Polymers; Sensor phenomena and characterization; Solid state circuits;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662563
